Manufacturer : Gasonics
Role of the equipment
The Gasonic Aura 1000 is an « afterglow » type plasma chamber where reactive oxygen ions are generated to remove polymers or organic contaminants.
• Downstream type tool that avoid sample dammages due to ionic bombardment
• Cassette to cassette robot (100 mm)
Examples of available processes and services
• Photoresist removal / descum process
Academic | Private sector Rate :